Design and analysis of DOE-based microinterferometer


  • Michal Jozwik Warsaw University of Technology
  • Krzysztof Wielgo Warsaw University of Technology
  • Tomasz Kozacki Warsaw University of Technology



This paper describes the design and numerical study of a Twyman-Green microinterferometer based on Diffractive Optical Elements (DOEs). Its compact design allows to fabricate several interferometers in an array-like pattern on an optical wafer - with horizontal dimensions appropriately adapted to the tested structures. To prove the design concept of the proposed interferometer configuration a laboratory setup was realized. The first results of the interferometric measurements on an MEMS object are presented.

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How to Cite

Jozwik, M., Wielgo, K., & Kozacki, T. (2011). Design and analysis of DOE-based microinterferometer. Photonics Letters of Poland, 3(3), pp. 122–124. lett. pl.v3i3.241