Thickness control of thin dielectric layers by the generalized m-line spectroscopy method
AbstractThis paper presents an application of the generalized m-line spectroscopy method to immediate evaluation of a thin dielectric layer thickness deposited on a waveguide without any numerical calculation. For this purpose, a calibration curve (i.e., dependence of a thin layer thickness on coupling angle of the corresponding mode) shall be determined. It allows determining sample thickness by measuring the coupling angle of the mode. In the present paper it has been shown that multimode waveguides are best for our measurement investigation. The sensor has the greatest sensitivity in the measurement of coupling angles for a higher number of modes.
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How to Cite
E. Auguściuk and B. Bogdanowicz, “Thickness control of thin dielectric layers by the generalized m-line spectroscopy method”, Photon.Lett.PL, vol. 2, no. 2, pp. pp. 70–72, Jun. 2010.