Rib waveguides based on the sol-gel derived SiO2 :TiO2 films

Authors

  • Paweł Karasiński
  • Cuma Tyszkiewicz
  • Roman Rogoziński

DOI:

https://doi.org/10.4302/photon.%20lett.%20pl.v2i1.91

Abstract

This work presents rib waveguides fabricated by chemical etching of inorganic two-component SiO2:TiO2 films. Silica-titania films were fabricated using sol-gel method. In all technological processes involving masking, standard photolithographic procedures were used. A photoresist was used as a mask in the chemical etching processes. Rib waveguides of 5 nm rib height and rib width of less than 4μm were single mode for a wavelength of λ=635nm. The attenuation determined for fabricated rib waveguides approximately equal to 1,5dB/cm.

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References:
  1. P. Karasiński, R. Rogoziński, "Rib waveguides fabricated by means of chemical etching of sol-gel films SiO2:TiO2", Optics Communications 245, 237-242 (2005).[CrossRef]
  2. P. Karasiński, C. Tyszkiewicz, R. Rogoziński, J. Jaglarz, J. Mazur, "Optical rib waveguides based on sol-gel derived silica-titania films", the paper sent to Thin Solid Films.
  3. K.S. Chiang, "Effective-index analysis of optical waveguides", Proc. SPIE 2399, 2-12 (1995).[CrossRef]
  4. C.J. Brinkner, G.W. Scherer, Sol-gel science, (San Diego, Academic Press, Inc. 1990).
  5. P. Karasiński, Opt. Appl. 34, 467 (2007).
  6. P. Karasiński, Act. Phys. Pol. A 116, 114 (2009).

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Published

2010-03-31

How to Cite

[1]
P. Karasiński, C. Tyszkiewicz, and R. Rogoziński, “Rib waveguides based on the sol-gel derived SiO2 :TiO2 films”, Photonics Lett. Pol., vol. 2, no. 1, pp. pp. 40–42, Mar. 2010.

Issue

Vol. 2 No. 1 (2010)

Section

Articles

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