Rib waveguides based on the sol-gel derived SiO2 :TiO2 films


  • Paweł Karasiński
  • Cuma Tyszkiewicz
  • Roman Rogoziński




This work presents rib waveguides fabricated by chemical etching of inorganic two-component SiO2:TiO2 films. Silica-titania films were fabricated using sol-gel method. In all technological processes involving masking, standard photolithographic procedures were used. A photoresist was used as a mask in the chemical etching processes. Rib waveguides of 5 nm rib height and rib width of less than 4μm were single mode for a wavelength of λ=635nm. The attenuation determined for fabricated rib waveguides approximately equal to 1,5dB/cm.

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How to Cite

P. Karasiński, C. Tyszkiewicz, and R. Rogoziński, “Rib waveguides based on the sol-gel derived SiO2 :TiO2 films”, Photonics Lett. Pol., vol. 2, no. 1, pp. pp. 40–42, Mar. 2010.