Surface quality control of thin SiN layer by optical measurements

Authors

DOI:

https://doi.org/10.4302/plp.v13i3.1096

Abstract

Fiber optic interferometers have a wide range of applications including biological and chemical measurements. Nevertheless, in case of a reflective interferometer setup, standard silver mirrors cannot be used in every measurement, due to their chemical activity. In this work, we investigate the surface quality of a thin optical layer of silicon nitride (SiN) which can serve as an alternative material for silver mirrors. We present measurements carried out with a Fabry-Perot fiber optic interferometer working in a reflective mode. Measurement results allow us to determine the surface quality of the investigated layer.

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References
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Published

2021-09-30

How to Cite

[1]
J. Gierowski and S. Pawłowska, “Surface quality control of thin SiN layer by optical measurements”, Photonics Lett. Pol., vol. 13, no. 3, pp. 61–63, Sep. 2021.

Issue

Vol. 13 No. 3 (2021)

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Articles

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