An interferometric test station for massive parallel inspection of MEMS and MOEMS


  • Malgorzata Kujawinska Warasw University of Technology
  • Kay Gastinger
  • Michal Jozwik
  • Karl Henrik Haugholt
  • Christoph Schaeffel
  • Stefan Beer



The paper presents the optical, mechanical, and electro-optical design of an interferometric inspection system for massive parallel inspection of Micro(Opto)ElectroMechanicalSystems (M(O)EMS). The basic idea is to adapt a micro-optical probing wafer to the M(O)EMS wafer under test. The probing wafer is exchangeable and contains a micro-optical interferometer arrays. Two preliminary interferometer designs are presented; a low coherent interferometer array based on a Mirau configuration and a laser interferometer array based on a Twyman-Green configuration. The optical design focuses on the illumination and imaging concept for the interferometer array. The mechanical design concentrates on the scanning system and the integration in a standard test station for micro-fabrication. The smart-pixel approach for massive parallel electro-optical detection and data reduction is discussed.

Author Biography

Malgorzata Kujawinska, Warasw University of Technology

SPIE Fellow, Professor of applied optics at Warsaw University of Technology, head of Optical Engineering Division at Institute of Micromechanics and Photonics, recognized expert on full-field optical metrology, image processing and hybrid experimental-numerical methods in experimental mechanics, material engineering, reverse engineering and multimedia. Author of more than 200 papers and leader of 6 European Projects and numerous of national projects for the Ministry of Science and Higher Education as well as for industry.




How to Cite

M. Kujawinska, K. Gastinger, M. Jozwik, K. H. Haugholt, C. Schaeffel, and S. Beer, “An interferometric test station for massive parallel inspection of MEMS and MOEMS”, Photonics Lett. Pol., vol. 1, no. 2, pp. pp. 58–60, Jun. 2009.