Gierowski, Jakub, and Sandra Pawłowska. “Surface Quality Control of Thin SiN Layer by Optical Measurements”. Photonics Letters of Poland 13, no. 3 (September 30, 2021): 61–63. Accessed March 29, 2024. https://www.photonics.pl/PLP/index.php/letters/article/view/13-21.