KUJAWINSKA, Malgorzata; GASTINGER, Kay; JOZWIK, Michal; HAUGHOLT, Karl Henrik; SCHAEFFEL, Christoph; BEER, Stefan. An interferometric test station for massive parallel inspection of MEMS and MOEMS. Photonics Letters of Poland, [S. l.], v. 1, n. 2, p. pp. 58–60, 2009. DOI: 10.4302/photon. lett. pl.v1i2.27. Disponível em: https://www.photonics.pl/PLP/index.php/letters/article/view/1-20. Acesso em: 22 feb. 2024.