TY - JOUR AU - Gierowski, Jakub AU - Pawłowska, Sandra PY - 2021/09/30 Y2 - 2024/03/29 TI - Surface quality control of thin SiN layer by optical measurements JF - Photonics Letters of Poland JA - Photonics Lett. Pol. VL - 13 IS - 3 SE - Articles DO - 10.4302/plp.v13i3.1096 UR - https://www.photonics.pl/PLP/index.php/letters/article/view/13-21 SP - 61-63 AB - Fiber optic interferometers have a wide range of applications including biological and chemical measurements. Nevertheless, in case of a reflective interferometer setup, standard silver mirrors cannot be used in every measurement, due to their chemical activity. In this work, we investigate the surface quality of a thin optical layer of silicon nitride (SiN) which can serve as an alternative material for silver mirrors. We present measurements carried out with a Fabry-Perot fiber optic interferometer working in a reflective mode. Measurement results allow us to determine the surface quality of the investigated layer. <br /> <br /> Full Text: <a class="file" href="/PLP/index.php/letters/article/view/13-21/665" target="_parent">PDF</a> <br /> <br /> <strong>References</strong><ol><li>K. Karpienko, M.S. Wróbel, M. Jedrzejewska-Szczerska, "Determination of refractive index dispersion using fiber-optic low-coherence Fabry-Perot interferometer: implementation and validation", Opt Express, 53, 077103 (2014). <a class="file" href="https://doi.org/10.1117/1.OE.53.7.077103" target="_parent"> CrossRef </a></li><li>Jedrzejewska-Szczerska M., Gnyba M., Kosmowski B. B. "Low-coherence fibre-optic interferometric sensors", Acta Phys. Pol. A 120, 621 (2011). <a class="file" href="https://doi.org/10.12693/APhysPolA.120.621" target="_parent"> CrossRef </a></li><li>M. Jedrzejewska-Szczerska "Response of a new low-coherence Fabry-Perot sensor to hematocrit levels in human blood",Sensors 14(4), 6965 (2014). <a class="file" href="https://dx.doi.org/10.3390%2Fs140406965" target="_parent"> CrossRef </a></li><li>M. Kosowska, D. Majchrowicz, K.J. Sankaran, M. Ficek, K. Haenen, M. Szczerska, "Doped Nanocrystalline Diamond Films as Reflective Layers for Fiber-Optic Sensors of Refractive Index of Liquids", Materials 12, 2124 (2019). <a class="file" href="https://doi.org/10.3390/ma12132124" target="_parent"> CrossRef </a></li><li>Shou-YiChang, Yi-Chung Huang, "Analyses of interface adhesion between porous SiO2 low-k film and SiC/SiN layers by nanoindentation and nanoscratch tests", Microelectron. Eng. 84(2), 319 (2007). <a class="file" href="https://doi.org/10.1016/j.mee.2006.10.086" target="_parent"> CrossRef </a></li><li>X. Wang, C. Wang, X. Shen, F. Sun, "Potential Material for Fabricating Optical Mirrors: Polished Diamond Coated Silicon Carbide". Appl. Opt. 56, 4113 (2017). <a class="file" href="https://doi.org/10.1364/AO.56.004113" target="_parent"> CrossRef </a></li><li>G. Coppola, P. Ferraro, M. Iodice, S. De Nicola, "Method for measuring the refractive index and the thickness of transparent plates with a lateral-shear, wavelength-scanning interferometer", Appl. Opt. 42, 3882 (2003). <a class="file" href="https://doi.org/10.1364/AO.42.003882" target="_parent"> CrossRef </a></li><li>H. Mäckel, R. Lüdemann, "Detailed study of the composition of hydrogenated SiNx layers for high-quality silicon surface passivation", J. Appl, Phys. 92, 2602 (2002). <a class="file" href="https://doi.org/10.1063/1.1495529" target="_parent"> CrossRef </a></li><li>N. Atman, M. Krzywinski, "Visualizing samples with box plots", Nat. Methods, 11(2), 119 (2014). <a class="file" href="https://doi.org/10.1038/nmeth.2813" target="_parent"> CrossRef </a></li><li>M. Vignesh, R. Balaji, "Data analysis using Box and Whisker Plot for Lung Cancer", International Conference on Innovations in Power and Advanced Computing Technologies,(2017). <a class="file" href="http://dx.doi.org/10.1109/IPACT.2017.8245071" target="_parent"> CrossRef </a></li></ol> ER -